Ga₂O₃ Wafer (Beta Gallium Oxide Wafer)

Epi-ready single crystal β-Ga₂O₃ substrate for power electronics and UV applications

 

Add To Quote
Description

🔷 Overview

Ga₂O₃ wafer is a single crystal beta-phase gallium oxide substrate with an ultra-wide bandgap (~4.8–4.9 eV), suitable for high-voltage devices, UV photodetectors, and epitaxial growth research.

LATECH provides high-quality β-Ga₂O₃ substrates with multiple doping options, orientations, and surface finishes for both R&D and advanced applications.

 

🔷 Key Features

  • Ultra-wide bandgap semiconductor (~4.8–4.9 eV)
  • Available in undoped, Sn-doped (n-type), and Fe-doped (semi-insulating) grades
  • Common orientations: (201), (010)
  • Epi-ready polished surface available
  • Low surface roughness (Ra < 0.5 nm)
  • Custom sizes and specifications available

 

🔷 Specifications

Product:

Single crystal Gallium oxide (Ga2O3) wafer

Material property:

Crystal structure:             Monoclinic

Lattice constant:              a = 12.23 Å, b = 3.04 Å, c = 5.80 Å;  ß=103.7°               

Density:                             5.95 g/cm3

Melting point:               1725 °C

Bandgap:                       4.8-4.9 eV

Mobility:                         100-200 cm2/v.s

Growth method:             CZ

Dopant

• Sn / N-type

• Un-doped / N-type

• Fe / Insulation

Dimension:

• 5 × 5 × 0.5 mm

• 5 × 10 × 0.5 mm

• 10 × 10 × 0.5 mm

• 20 × 20 × 0.5 mm

• Other sizes customizable

Orientation:

• <201> ± 0.5°

• <010> ± 0.5°

Polishing:

• Fine ground

• Single side epi-polished

• double side epi-polished

Surface roughness:

< 0.5 nm

 

 

🔷 Applications

  • Power electronics
  • UV photodetectors
  • Epitaxial growth
  • Semiconductor R&D

 

🔷 Customization

Custom specifications are available upon request:

  • Size & thickness
  • Orientation & off-cut
  • Surface polishing
  • Doping type