Normal Scanning:
• Scanning Mode: θ - 2θ • 2θ Angle Range: 10° - 90° (or as required)
Small Angle Scanning:
• Scanning Mode: θ - 2θ • 2θ Angle Range: 3° - 10° (or as required)
Grazing Incidence Diffraction (GID, GIXRD): • Scanning Mode: α - 2θ • α is the fixed incidence angle: 1° (or as required) • 2θ Angle Range: 10° - 90° (or as required)
X-Ray Reflectivity (XRR): • Analyses of film thickness, roughness, etc
High Temperature Scanning:
• Scanning Mode: θ - 2θ • 2θ Angle Range: 10° - 90° (or as required) • Substrate Temperature: RT - 2000 °C
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