Thermal oxide coated Si wafers by dry or wet oxidation, single/double side coatings available
| Product: | Si wafer with SiO2 (thermal oxide) layer |
| Production method: | High temperature furnace oxidation of Si wafer |
| Appearance: | Color changes from silver gray to purple/blue after oxidation. |
| Si base wafer: | Oxide layer can be produced on Si wafer of any grade (prime / dummy / solar / etc) |
| SiO2 coating: | • Oxide layer coated on double sides Oxidation in air naturally produced oxide layer on both sides of the wafers. • Oxide layer coated on single side SiO2 layer on back side (usually non-polished side) can be removed upon request. |
| Oxide layer thickness: | 10 nm up to 10 um |
| Polishing: | • As-cut wafers without polishing • Single side epi-polished • Double side epi-polished |
