Dummy grade Si wafers, epi-polished surface, low requirements on resistivity, orientation, etc
Product: | Silicon (Si) wafer |
Grade: | Dummy grade Dummy wafers and prime wafers are both of 11N purity with epi-polished surfaces. The difference between them is that dummy wafers do not have strict requirements on orientation and resistivity, and thus are cheap and suitable for certain applications. |
Purity: | 99.999999999% (11N) |
Dimension: | Standard dimensions: • 2'' × 0.28 mm, 2'' × 0.4 mm • 4'' × 0.525 mm • 6'' × 0.625 mm • 8'' × 0.725 mm Other diameters and thicknesses available |
Orientation: | No requirements (can be any direction) |
Conductive type: | No requirements (can be any type) |
Resistivity: | No requirements (can be any resistivity) |
Polishing: | • As-cut wafers without polishing • Single side epi-polished • Double side epi-polished |
Surface roughness: | < 0.5 nm |
Remarks: | Dummy wafers have the same surface polishing conditions as prime wafers. |