Material

 JGS1/JGS2 /JGS3/Borofloat 33 /Coring /B270/BK7 /Soda lime /etc

Spec

unit

3”

4”

5″

6″

8″

12″

Diameter/size(or Square)

mm

76.2

100

125

150

200

300

Tol(±)

mm

<0.1~.25 mm

Thinnest Thickness

mm

>0.10

>0.18

>0.30

>0.30

>0.30

>0.50

Primary Flat

mm

22

32.5

42.5

57.5 / notch

notch

notch

LTV (5mmx5mm)

µm

<2

<2

<2

<2

<2

<10

TTV

µm

<8

<10

<15

<20

<30

<30

Bow

µm

±20

±25

±40

±40

±60

±60

Warp

µm

<30

<40

<50

<50

<60

<60

PLTV(<0.5um)

%

≥95%(5mm*5mm)

Transmittance

UV,Optical,IR or Custom option

Edge Rounding

mm

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type

Single Side Polished /Double Sides Polished

Polished side Ra

nm

<1.0nm or specific per requested

Back Side Criteria

µm

General is 0.2-0.5µm or as customized

Appearance

Contamination

None

Particles >0.3µm

<=30

Saw Marks, striations

None

Scratch

None

Cracks, crowsfeel saw marks, stains

None